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X-ray reflectometer Product List

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X-ray Reflectivity Method

X-ray Reflectivity Method

XRR：X-ray Reflectivity

XRR measures the reflection intensity of X-rays incident on the sample surface at a very shallow angle. By comparing the reflection X-ray intensity profile obtained from this measurement with simulation results and optimizing the simulation parameters, this method determines the film thickness and density of the sample. - Evaluation of film thickness is possible (approximately 2 to 300 nm) - Evaluation of density is possible - Evaluation of surface roughness is possible (Rms ≤ 5 nm) - Non-destructive analysis is possible - Average information over a wide area of approximately 10×20 mm can be obtained

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  • Contract Analysis
  • Contract measurement
  • Contract Inspection

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[Analysis Case] Measurement of Film Density and Film Thickness of Organic EL Device Stacked Films

[Analysis Case] Measurement of Film Density and Film Thickness of Organic EL Device Stacked Films

X-ray reflectivity measurement (XRR) allows for non-destructive analysis of film thickness and density.

Organic EL displays are advancing in practical applications by leveraging advantages such as high brightness, high-resolution color, and thinness due to their self-emissive principle. Organic EL devices are manufactured by stacking organic films, but analyzing the organic films in their stacked state has been challenging. This time, by using the XRR method, it has become possible to measure the film thickness and density of the organic films while maintaining the stacked state. Analysis of the thickness and density of stacked films is possible regardless of whether they are crystalline or amorphous.

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Evaluation of thin films using X-ray reflectivity measurement (XRR)

Evaluation of thin films using X-ray reflectivity measurement (XRR)

If the membrane structure and composition information is known in advance, multilayer membranes can also be evaluated through simulation!

We would like to introduce our "Thin Film Evaluation using X-ray Reflectivity Measurement (XRR)." X-ray Reflectivity Measurement (XRR) allows us to obtain information about surface (interface) roughness, film density, and film thickness by fitting the X-ray profile, which shows attenuation and interference fringes near total external reflection, with a calculated profile. Please feel free to contact us if you have any inquiries. 【Thin Films that can be Analyzed】 ■Sample Surface: Mirror-like (Surface Roughness less than 5nm) ■Sample Size: 30mm x 30mm or larger *Please consult us if the size is smaller ■Film Thickness: 2nm to 500nm ■Required Information: Film structure and film composition information *For more details, please download the PDF or feel free to contact us.

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